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This book examines the recent progress made in the emerging field of microelectromechanical systems (MEMS) technology in the context of its imminent insertion and deployment in radio frequency (RF) and microwave wireless applications. In particular, as the potential of RF MEMS to enable the implementation of sophisticated, yet low-power, portable appliances that will fuel the upcoming wireless revolution gains wide recognition, it is imperative that the knowledge base required to quickly adopt and gainfully exploit this technology be readily available. In addition, the material presented herein will aid researchers in mapping out the terrain and identifying new research directions in RF MEMS. Accordingly, this book goes beyond an introduction to MEMS for RF and microwaves [which was the theme of our previous book Introduction to Microelectromechanical (MEM) Microwave Systems (Artech House, 1999)] and provides a thorough examination of RF MEMS devices, models, and circuits that are amenable for exploitation in RF/microwave wireless circuit design.
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