MEMS Mechanical Sensors

caroline11

Preface
The field of microelectromechanical systems (MEMS), particularly micromachined mechanical transducers, has been expanding over recent years, and the production costs of these devices continue to fall. Using materials, fabrication processes, and design tools originally developed for the microelectronic circuits industry, new types of microengineered device are evolving all the time—many offering numerous advantages over their traditional counterparts. The electrical properties of silicon have been well understood for many years, but it is the mechanical properties that have been exploited in many examples of MEMS. This book may seem slightly unusual in that it has four editors. However, since we all work together in this field within the School of Electronics and Computer Science at the University of Southampton, it seemed natural to work together on a project like this. MEMS are now appearing as part of the syllabus for both undergraduate and postgraduate courses at many universities, and we hope that this book will complement the teaching that
is taking place in this area.